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 Introduction to semiconductor manufacturing technology

Course Objectives:

This is a Semiconductor Fabrication Technology Introduction course, you can learn about the developing of semiconductor technology, fabrication processes, technological principal and essential fundamental concept of all kinds of processing equipment. Thus, it is very helpful for all trainees who like to enter the career of Semiconductor or Photoelectric related industries.

Instructor(s)

Dr. Shu-Han Hsu/ Associate Researcher

Ph.D., Supramolecular Chemistry &Technology/ Molecular Nanofabrication of MESA+ institute, University of Twente, Netherlands.

M.S., Material Physics and Nanotechnology, Linköping university, Sweden

B.S., Department of Material Science and Engineering, National Tsing-Hua University, Taiwan.

Level

Graduate or undergraduate

Subject / Place / Date/Fee

Semiconductor Fabrication Technology Training Class (Language: English)

Room 307A, NDL Hsinchu (No.26, PROSPERITY Rd.I, Science Park, Hsinchu City)

Fee: NT$ 4,800 for Student, NT$ 10,000 for non-Student

April 25-26, May 2-3, May 9, 2015

Registration

Registration is now open: http://www.ndl.org.tw/

E-Mail:mjchang@narlabs.org.tw

 

 

 

Day 1 (April 25 SAT)

Day 2 (April 26 SUN)

Day 3 (May 2 SAT)

Day 4 (May 3 SUN)

Day 5 (May 9 SAT)

09︰00

12︰00

Introduction

CH 1-3

Thermal process

CH 5

Plasma basics

CH 7

Etch

CH 9

CMP

CH 12

13︰30

16︰30

Wafer manufactory &Si(Ge) Epitaxy

CH 4

photolithography

CH 6

Ion Implantation

CH 8

CVD and metallization

CH 10-11

Process integration

CH 13-15

Exam:15:40-16:10