• Procedure
  • Hsin-chu Site
  • Metrology Analysis Service
  • High Frequency Technology
  • Tainan Site

* Hsinchu Service Division

At present, Hsinchu Service Center is equipped with an almost complete 6-inch wafer manufacture line. In addition to providing OEM service for academic purposes, we open most equipment for student self-operation, thus bringing significant contributions to the cultivation of semiconductor and nano device manufacture talents and visionary academic research.

In addition to the semiconductor and nano device manufacture process service, Hsinchu Service Center provides a 5-inch mask manufacture service. Compared to the higher charges of the industry, the Hsinchu ServiceCenter attracts over 600 cases on average each year and benefits a great number of professors and students for its bargain service.

To improve service quality and expertise, NDL Hsinchu Service Center is divided into the process service, photolithographic mask, and etching film divisions. The process service division provides OEM service while other two divisions are responsible for equipment and process stability maintenance and new process technology development.

You are welcome to subscribe to our services. The OEM commission charge is subject to the industry charge standard.

Step Item Contact Window Procedure
1 Single Station Process Station Engineer
  1. Applicants should discuss the process requirements with the station engineer.
  2. Apply for OEM service from the Services System and complete the process requirements from MES.
  3. Wait for NDL estimation.
  4. Confirm estimate from the MES, print the “Station OEM Request Form” from the Services System, and ask project principal investigator to sign the form.
  5. Submission of application
    [Students living in remote areas may mail the “Station OEM Service Request Form” (print on air laid paper) together with the “test chip” to NDL: Hsinchu to Ms. Xiu-fang Jian or STSP to Ms. Ling-ru Zhou.]
    [OEM Operating Manual]
    [Project Family Relationship Operating Manual]
2 Continuous Process Jin-long Song
ext. 7653
  1. Applicants shall discuss the process requirements with the continuous process leader (Jin-long Song ext.7653).
  2. The application procedure is the same as that of the single station process.
3 Acceptance and registration Station engineer
Jin-long Song
After applicants submit the request form and test chip to the contact window, the NDL inspection line and engineer will implement the process. After the assignment is completed, they will send the outcomes to the contact window.
4 Process change If there is a process change in an OEM assignment, select “Hold” from the drop-down on MES and discuss with the engineer before resuming the assignment. Please note that the assignment will be re-estimated after a process change. Applicants will need to print the OEM Service Request Form again.
5 Collection and end of case Cashier:
Ai-lian Guo ext.7626
  1. When collecting the results from the contact window,applicants shall sign the request form before collection.
  2. When collecting masks (mask manufacture or material fees shall be paid in cash),pleasepay the material fee at the NDL cashier desk before picking up masks at the contact window with the cashier’s receipt with the PAID stamp affixed.
* Metrology Analysis Services

NDL provides high quality material analysis services, cultivates talents, and performs R&D for prospective technologies and methods. In addition to single machine service for various major equipments, integrated analysis services and customized sample preparation services are also provided with complete and rapid analysis results. The current technology services may be subdivided into 3 fields, including:

  1. Surface chemical analysis technology, including SIMS (Secondary Ion Mass Spectrometer), AES (Auger Electron Microscopy) and XPS (X-ray Photoelectron Spectroscopy).
  2. Scan analysis technology: including AFM (Atomic Force Microscopy), SCM (Scanning Capacitance Microscopy), CAFM (Conductive Atomic Force Microscopy), and SEM (Scanning Electron Microscopy).
  3. Diffraction analysis technology: including HRTEM (High Resolution Transmission Electron Microscopy) and XRD (X-ray Diffractometer).

Besides, in order to enhance quality and performance of laboratory operation, highlight profession of laboratories, and improve credibility of test results, nano Metrology laboratory is approved from the assessment of TAF (Taiwan Accreditation Foundation), and certified with 8 measurement technology certificates of ISO 17025:2005 testing laboratory, including AFM step height measurement, AFM line width measurement, TEM line width measurement, SEM line width measurement, SEM surface image observation, SIMS depth range of boron element, phase identification of XRD, and surface qualitative analysis of XPS etc. Moreover, the agreement of ILAC MRA (International Laboratory Accreditation Cooperation Mutual Recognition Agreement) was signed on January 3, 2008, indicative of the achievement of international level of technical ability for laboratories with technology equal to the laboratories recognized by 80 accreditation institutes in 67 countries all over the world.

* Foundry Services (Academia)
Step Item Contact Window Procedure
1 Single Station Service Operating Engineer Applicants should fill out the assignment request form from the Services System and MES. An ↤assignment is accepted after it is confirmed and quoted by the engineer.
※ Log in to the MES and complete the equipment service request form
2 Integrated Analysis Chien-Ting Wu
(ext. 7682/7425/7408)
Applicants should fill out the integrated analysis request form from (at least three analysis items) the Services System and MES. An assignment is accepted after it is confirmed and quoted by the engineer.
3 Acceptance and Registration Xiu-fang Jian
(ext. 7610)
After applicants submit the request form and testing samples to the contact window, the NDL engineer will implement the process operation. After the assignment is completed, they will send the results to the contact window.
4 Collection Xiu-fang Jian When collecting the results from the contact window, applicants shall sign the request form before collection.

* Regulations
  1. Applicants shall complete the request form in detail and make the application with reference to the required procedure. If the analysis requirements are unclear, the operating engineer will be unable to proceed .
  2. Applicants may discuss with the operating engineer to find the optimal analysis requirements. Applicants shall not alter the agreed analysis contents to ensure accountability of the analysis results.
  3. For better quality and assurance of metrology analysis, applicants are obliged to specify the properties of testing samples (e.g. electrical property, magnetic property, toxicity, radioactivity, chemical composition, crystal structure, process, surface profile, etc.) and the purpose of analysis. The operating engineer may reject the assignment if there is a concern that the testing samples may damage the equipment.
* High frequency technology Services

High-Frequency Technology Center at NDL has been dedicated to building high frequency technologies to provide comprehensive measurement services and technical consultation. We own complete measurement environment to assist academia and industries in research and development of high frequency devices, circuits and applications. Worldwide top class high frequency measurement platforms have been built to effectively support high frequency community in Taiwan. The major missions include :

  1. Providing accurate and efficient high frequency measurement services for academia and industries
  2. Collaborating with academia and industries in advanced R&D for high frequency devices, circuits and applications
  3. R&D of testing, modeling and design techniques in the field of high frequency technologies
  4. Providing advanced training courses related to high frequency techniques.

Currently, various measurement platforms up to 220 GHz have been built, and the frequency range will be extended to 500 GHz in 2014:

  1. 220 GHz S-parameter measurement platform
  2. 220 GHz high frequency circuit measurement platform
  3. 90 GHz load-pull measurement platform
  4. 90 GHz noise parameter measurement platform
  5. High voltage power device measurement platform

Step Item Contact Window Procedure
1 Single Station Process Operating Engineer Applicants should fill out the assignment request form from the Services System and MES. An assignment is accepted after it is confirmed and quoted by the engineer.
2 Acceptance and registration Xiu-fang Jian
(ext. 7610)
After applicants submit the request form and testing samples to the contact window, the NDL inspection line and engineer will implement the process operation. After the assignment is completed, they will send the results to the contact window.
3 Collection Xiu-fang Jian When collecting the results from the contact window, applicants shall sign the request form before collection.

* Tainan Service Center

As a collaborative research center for integrated circuits (ICs) in Taiwan, the National Nano Device Laboratories (NDL) has cultivated many semiconductor talents for years. To integrate industrial, academic, and research resources for technology R&D in southern and northern regions and to expand the R&D capability of the southern region, NDL established the Tainan Service Center in Southern Taiwan Science Park (STSP) on the 19th September, 2002. Further on the 3rd October, 2007, NDL built another laboratory in Chimei Building in the NCKU campus to expand the scope of services.

The Tainan Service Center was established for two main targets:

Extending the service of process and talent cultivation:

  • Having the one-stop service window to provide proximate service of process R&D for industries, academic institutions, and research institutions in southern region and to reinforce cultivation and training for technology talents.
  • Promoting the R&D of nano electromechanical technology and nano biochip manufacturing technology.

In addition to constructing a clean room with an area over 3,600 sq. ft. in the standard fab of STSP, we have established the Optoelectronics Laboratory on the 8th floor of Chi-Mei Building in the NCKU campus. Year by year we have built equipment for researching and developing nano device fabrication and solar renewable energy, and we are equipped with the analysis ability for materials and devices. By providing industries, academic institutions, and research institutions with the service of the required semiconductors, solar cells, MEMS process equipment, and education/training, we aim to help them upgrade engineering R&D capability and to offer the same R&D resources and education service to southern region as to northern region.

OEM service charges
OEM service for academic institutions (including Academia Sinica): The technical service fee will be 10% of the price specified by academic institutions, and 100% material fee.

Step Item Contact Window Procedure
1 Single Station Process Station Engineer Applicants should discuss the processrequirements with the station engineer. After they are confirmed by the process engineer, applicants should send the on-line request form and test samples to the service window (Ms. Lin-Ju Chou ext. 6632) to complete the service request.
2 Continuous Process Station engineers Applicants should discuss the process requirements with each station engineer. After they are confirmed by all engineers, applicants should send the on-line request form and test samples to the service window (Ms. Lin-Ju Chou ext. 6632) to complete the service request.
3 Acceptance and registration Ms. Lin-Ju Chou
ext. 6632
After applicants submit the request form and test samples to the contact window, the NDL inspection line and engineer will implement the process. After the assignment is completed, they will send the outcomes to the contact window.
4 Collection and end of case Ms. Lin-Ju Chou
ext. 6632
  1. When applicants collectting the outcomes from the contact window, applicants shall sign the request form before collection.
  2. When collecting masks, applicants should pay the material fee in cash before collection.

* Instrument Operation Training and Evaluation Application Regulations
  1. Only students passing evaluation of eligibility for instrument operation conducted by case officers with reference to the “Equipment Operation Eligibility Evaluation Procedure” can apply for equipment/instrument operation.
  2. Application form: Based on the target instrument, download the“Equipment Operation Evaluation Form” from the website or obtain the form at the NDL customer service center.
  3. As it needs to bring the evaluation form into the clean room, please print on dust-free paper with an inkjet printer. Do not print the form on ordinary paper with a laser printer.
  4. Application procedure for equipment operation evaluation: Applicant→Advisor→Case Officer→Responsible Engineer→Trainer→ Examiner→ Authorized Approver→Case Officer.
  5. When students apply for equipment operation training, students who have just passed the equipment operation evaluation will be their trainer. Students applying for training may voluntarily ask for help from students who have passed the equipment operation evaluation to be their trainers. They can also get the name of the last three students passing the evaluation at the customer service center and contact them by phone to find the appropriate trainer.
  6. If the three trainers arranged by the business promoter are unavailable, students who wish to receive training may ask the equipment responsible engineer to coordinate with these three trainers to arrange an appropriate training time.
  7. Students who have passed equipment operation training are obliged to train other students. Students who regularly refuse to provide training service will be suspended or disqualified from equipment operation by this team.
  8. Equipment operation training and evaluation are mainly based on the“SOP” and “Evaluation Item List” of relevant equipment/instruments. These two documents will be placed next to respective equipment/ instruments for the reference of teaching. They are also posted on the website for students to download for preparations.
  9. After equipment operation training, the responsible engineer of respective equipment/instruments will evaluate the practical operation of students. The standard and result of evaluation shall be registered in the “Equipment Evaluation Form”.
  10. The “Equipment Evaluation Form” to students passing the evaluation shall be forwarded to the case officer for filing. The case officer shall assign system privilege for these students with reference to the “Member Management Procedure”. Students failing the valuation will need to wait for two weeks before they can contact the responsible engineer to re-sit the evaluation.
  11. This team only allows three attempts for students. Before the last attempt, we will notify the advisor of students. Students failing in all three attempts cannot apply for a second chance with any excuses.
  12. Only students passing the equipment operation evaluation are allowed to book equipment over the internet.
  13. Students must operate equipment with reference to the equipment’s SOP and must record the condition of use in the “Equipment Use Record”.
  14. Keycard validity: A keycard will become invalid in the following two situations:
    1. Graduation: Students shall return the keycard and submit a copy of their master thesis/doctoral dissertation after graduation.
    2. Violation of relevant regulations: Students violating relevant regulations will be suspended with reference to the “Equipment Use Violation Management Directions”.
  15. Professors who wish to apply for a keycard to access NDL to use related equipment must apply for a keycard according to the same procedure as users.
  16. Equipment booking shall be made over the internet. If applicants do not use equipment within 15 minutes after the booking time, onsite users can use such equipment, and a violation will be marked for this booking. Users who violate the booking rules three times in one year (including all machines) will be disqualified from booking equipment for that year.